Characterization of carbon nanofibers synthesized by microwave plasma-enhanced CVD at low-temperature in a CO/Ar/O2 system

The low-temperature synthesis of carbon nanofibers by microwave plasma-enhanced chemical vapor deposition using a CO/Ar/O2 system and their characterizations were performed. At the optimum oxygen concentration of O2/CO = 7/1000, vertically aligned CNFs can be synthesized at temperatures as low as 180 °C with growth rates of 4–6 nm/s. The diameter of bulk CNFs is about 50–100 nm and the surface of CNFs is covered by branching fibers and their nuclei with a diameter of about 5–20 nm. Not only the peaks originating from carbon chains, but also oxygen containing groups, such as CO and COC, are observed in the FTIR spectra. The CNFs growth rate is almost independent from the substrate temperature and it is concluded that an elementary process not on the substrates, but in the gas phase, is the rate-determining step in the present CO/Ar/O2 microwave-plasma-enhanced CVD system.