Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles

Optical and electrical properties of H2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 84, September 2018, Pages 91-100

Prakash Uprety, Bart Macco, Maxwell M. Junda, Corey R. Grice, Wilhelmus M.M. Kessels, Nikolas J. Podraza,