کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7118255 | 1461373 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth and ripening of oxygen precipitation in neutron-irradiated Czochralski silicon
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
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چکیده انگلیسی
The effects of the vacancy-related defects introduced by neutron irradiation on oxygen precipitation in Czochralski silicon have been elaborately investigated. It is found that the vacancy-related defects significantly enhance the nucleation of oxygen precipitates as well as the growth of the grown-in oxygen precipitates. The Ostwald ripening of oxygen precipitates in neutron-irradiated silicon wafers is observed during a low-high two-step annealing. It is interpreted that the vacancy-related defects facilitate the formation of platelet-like oxygen precipitates, which continue to grow at the expense of small-sized oxygen precipitates during the high temperature annealing process. However, when subjected to the subsequent rapid thermal annealing at higher temperature, the platelet-like oxygen precipitates in the neutron-irradiated silicon exhibit lower stability due to the large surface free energy.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 74, February 2018, Pages 369-374
Journal: Materials Science in Semiconductor Processing - Volume 74, February 2018, Pages 369-374
نویسندگان
Peng Wang, Can Cui, Xuegong Yu, Deren Yang,