کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7118256 | 1461373 | 2018 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Boron-doped hydrogenated mixed-phase silicon as thermo-sensing films for infrared detectors
ترجمه فارسی عنوان
سیلیکون هیدروژنه مخلوط شده با بور، به عنوان فیلم های حساس حرارت برای آشکارسازهای مادون قرمز
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کلمات کلیدی
میکرو بولومتر، آشکارسازهای مادون قرمز، بورون دوطبقه، فیلم های سیلیکونی هیدروژنه،
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
چکیده انگلیسی
Silicon materials have been widely used as thermo-sensing layers in infrared detectors or uncooled micro-bolometers. Parameters such as a large thermal coefficient of resistance (TCR), low sheet resistance (Rs), and low 1/f noise are important for high performance of these devices. However, there is always a trade-off between these parameters. For example, the crystalline silicon materials typically exhibit low Rs and 1/f noise, and significantly low TCR, while the amorphous silicon materials generally have large TCR, and considerably high Rs and 1/f noise. Consequently, the best trade-off can be achieved by using a mixed-phase structure of silicon materials, i.e. an intermediate form between the crystalline and amorphous structures. Herein we report the important characteristics of hydrogenated mixed-phase silicon films, deposited by the plasma-enhanced chemical vapour deposition process, for infrared detectors. The films in the mixed-phase structure showed high TCR values in the range of 2-3% K-1 and moderate sheet resistances in range of 10-40 MΩ sqâ1. These results indicate that the mixed-phase silicon films are potential alternatives to conventional boron doped hydrogenated amorphous and microcrystalline silicon films for use as thermo-sensing layers in infrared detectors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 74, February 2018, Pages 165-169
Journal: Materials Science in Semiconductor Processing - Volume 74, February 2018, Pages 165-169
نویسندگان
Duy Phong Pham, Jinjoo Park, Chonghoon Shin, Sangho Kim, Yonghyun Nam, Geunho Kim, Minsik Kim, Junsin Yi,