کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7118574 | 1461400 | 2016 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effects of RTA temperatures on conductivity and micro-structures of boron-doped silicon nanocrystals in Si-rich oxide thin films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this work, the B-doped Si rich oxide (SRO) thin films were deposited and then annealed using rapid thermal annealing (RTA) to form SiO2-matrix silicon nanocrystals (Si NCs). The effects of the RTA temperatures on the structural properties, conduction mechanisms and electrical properties of B-doped SRO thin films (BSF) were investigated systematically using Hall measurements, Fourier transform infrared spectroscopy and Raman spectroscopy. Results showed that the crystalline fraction of annealed BSF increased from 41.3% to 62.8%, the conductivity was increased from 4.48Ã10â3 S/cm to 0.16 s/cm, the carrier concentration was increased from 8.74Ã1017 cmâ3 to 4.9Ã1018 cmâ3 and the carrier mobility was increased from 0.032 cm2 Vâ1 sâ1 to 0.2 cm2 Vâ1 sâ1 when the RTA temperatures increased from 1050 °C to 1150 °C. In addition, the fluctuation induced tunneling (FIT) theory was applicable to the conduction mechanisms of SiO2-matrix boron-doped Si-NC thin films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 47, 1 June 2016, Pages 7-11
Journal: Materials Science in Semiconductor Processing - Volume 47, 1 June 2016, Pages 7-11
نویسندگان
Junjun Huang, Li Wang, Hongyan Sun, Hui Wang, Min Gao, Wei Cheng, Zhenming Chen,