کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7150187 | 1462186 | 2018 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Ti/Al/Ti/TiW Au-free low temperature ohmic contacts for un-doped AlGaN/GaN HEMTs
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We demonstrated an Au-free ohmic contact for un-doped AlGaN/GaN HEMTs with Ti/Al/Ti/TiW metal structure. The Au-free ohmic contact was fabricated by pre-ohmic recess etching and low annealing temperature. The contact characteristics of the Ti/Al/Ti/TiW Au-free ohmic contacts including current-voltage, contact resistivity, and microstructure are systematically investigated. The contact resistivity of Ti/Al/Ti/TiW ohmic contact with 22-nm recessed depth and 600â¯Â°C annealing temperature is 5.44â¯Ãâ¯10â5â¯Î©â
cm2, which is comparable with conventional Ti/Al/Ni/Au ohmic contact. In addition, the Ti/Al/Ti/TiW ohmic contact shows smooth surface morphology with an excellent surface roughness of 3.69â¯nm. Besides, AlGaN/GaN MISHEMTs based on Ti/Al/Ti/TiW Au-free low temperature ohmic contacts were fabricated and exhibited good DC characteristics. The reported Au-free AlGaN/GaN HEMT fabrication process can be used in standard Si fabs without the risk of contamination.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid-State Electronics - Volume 147, September 2018, Pages 1-5
Journal: Solid-State Electronics - Volume 147, September 2018, Pages 1-5
نویسندگان
Qixin Li, Quanbin Zhou, Sheng Gao, Xiaoyi Liu, Hong Wang,