Effect of growth temperature and coating cycles on structural, electrical, optical properties and stability of ITO films deposited by magnetron sputtering

The effects of growth temperature, coating cycles on the structure, electrical and optical properties of ITO films were investigated, and the stability under high temperature, high temperature & high humidity and alkaline environments was focused. With increasing the growth temperature, the crystalline phase transforms from amorphous to crystalline. The surface morphology shows flat and dense structure. The thickness, sheet resistance and resistivity firstly decrease and then increase, and the optimal sheet resistance and resistivity is 7.6 Ω/sq and 1.1×10−4 Ω cm. The average visible transmittance of the ITO films and ITO glass exceeds 85% and 80%. The band gap increases from 3.75 eV to 3.95 eV. The electrical and optical properties of the ITO films are very stable after eight coating cycles. The growth temperature significantly affects the change rate of sheet resistance under high temperature, high temperature & high humidity and alkaline environments. However, the change rate of sheet resistance is stable and sight for eight coating cycles.