کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
726983 1461430 2011 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Formation of Si wells and pyramids on (1 0 0) surface as a result of Zn-Si interaction
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Formation of Si wells and pyramids on (1 0 0) surface as a result of Zn-Si interaction
چکیده انگلیسی
Interaction between metallic zinc and Si wafer at moderately high temperatures was found to generate either concave wells or hollow pyramid-shaped protrusions on the (1 0 0) wafer surface. The formation of the wells is attributed to the dissolution of silicon at temperatures much lower than its melting point in the form of Zn-Si eutectic. When the temperature was raised, Zn atoms in the eutectic droplets evaporated and Si atoms in them precipitated accordingly. If a droplet contained plenty of Si atoms, these Si atoms could encounter each other during precipitation at the surface of the droplet and condense into a hollow pyramid-shaped protrusion.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 14, Issues 3–4, September–December 2011, Pages 302-305
نویسندگان
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