کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
729829 1461433 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Is it possible to use external stress to tune silicon surface morphology?
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Is it possible to use external stress to tune silicon surface morphology?
چکیده انگلیسی

Our goal was to check if an external mechanical stress can be used to control the morphology of a Si surface. We show that: (1) due to plastic relaxation, a mechanical stress does not allow destabilization of a flat silicon surface by means of the Asaro–Tiller–Grinfeld mechanism; (2) the faceting period of vicinal Si surfaces destabilized by electromigration is not influenced by mechanical stresses but becomes more defective; (3) anisotropic surface reconstructions can be modified by a mechanical stress whereas isotropic surfaces seem to be less sensitive.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 12, Issues 1–2, February–April 2009, Pages 12–15
نویسندگان
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