Improved ESD properties by combining GaN-based light-emitting diode with MOS capacitor

An InGaN/GaN light-emitting diode (LED) combined with a metal–oxide semiconductor (MOS) capacitor has been fabricated for high electrostatic discharge (ESD) protection. By connecting a MOS capacitor in parallel with the GaN-based LED, a level of defense against the ESD is significantly strengthened from 200 to 1900 V of human body mode (HBM), which corresponds to 6- to 7-fold enhancement in the ESD robustness of LEDs.