Surface element-mapping of three dimensional structures by laser-induced breakdown spectroscopy

Our procedure does not need a constant focal plane and follows the topographic profile of the sample surface. Impurities and material inclusions are well detected. From the topographic information additionally obtained, a three-dimensional image of the sample can be deduced. Depth resolution is limited by the Rayleigh range of the LIBS laser light. The method is best suited for low energy laser pulses with high repetition rate and infrared emission.