A preconcentrator chip employing μ-SPME array coated with in-situ-synthesized carbon adsorbent film for VOCs analysis

► Solid phase μ-extraction array structure design for VOCs analysis. ► MEMS fabrications of VOCs preconcentrator chip. ► Direct growth of porous carbon adsorbent thin film (surface area 308 m2/g). ► Rapid thermal desorption in 5 s rising time to 300 °C. ► Preconcentration factor of ∼14,000 signal enhancement.