Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

Aging- and thermal-annealing effects on the vibrational- and microstructural-properties of PECVD grown hydrogenated amorphous silicon carbon nitride thin films

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vibrational Spectroscopy - Volume 94, January 2018, Pages 22-30

Mohd Azam Abdul Rahman, Boon Tong Goh, Wee Siong Chiu, Choon Yian Haw, Mohamad Rusop Mahmood, Poi Sim Khiew, Saadah Abdul Rahman,