کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7747657 | 1498668 | 2018 | 15 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Expanding the dimensions of metal-organic framework research towards dielectrics
ترجمه فارسی عنوان
گسترش ابعاد تحقیقات چارچوب فلزی- آلی نسبت به دی الکتریک
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کلمات کلیدی
دی الکتریک، کم نور فلزی چار چوب میکروالکترونیک،
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی معدنی
چکیده انگلیسی
Metal-organic frameworks (MOFs) belong to a class of hybrid materials that are unparalleled in their degree of structural diversity and functional tunability. The construction of these crystalline materials promise to advance the burgeoning field of ultra-low dielectrics. The rapid development of ultra-large-scale integration (ULSI) and the continuous miniaturization of feature sizes of integrated circuits approaching the nanometer (nm) scale, suggest that ultra-low dielectric constant materials will be needed, instead of the traditional SiO2 (κâ¯=â¯3.9). Appropriately designed MOFs promise to be the next generation of interlayer low-dielectric materials with the potential to be extremely porous, inert, and insulating. This review discusses our comprehensive investigations of obtaining low-κ MOFs and provides the current state of MOF research for dielectric applications. The design principles that are required to develop low-dielectric MOFs and structural elements that influence their behavior, as well as the integration of MOFs into metal-insulator-metal (MIM) devices are discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Coordination Chemistry Reviews - Volume 360, 1 April 2018, Pages 77-91
Journal: Coordination Chemistry Reviews - Volume 360, 1 April 2018, Pages 77-91
نویسندگان
Shruti Mendiratta, Muhammad Usman, Kuang-Lieh Lu,