کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
79083 49348 2012 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of antireflective layers on silicon using metal-assisted chemical etching with in situ deposition of silver nanoparticle catalysts
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی کاتالیزور
پیش نمایش صفحه اول مقاله
Fabrication of antireflective layers on silicon using metal-assisted chemical etching with in situ deposition of silver nanoparticle catalysts
چکیده انگلیسی

Ag particle-assisted chemical etching of silicon wafers in HF/H2O2 is of interest for its potential to produce antireflective layers for solar cells. In this work, Ag films containing both nanoscale (d<100 nm) and microscale (d<1 μm) particles were deposited through the silver-mirror reaction on planar p-Si(111), planar p-Si(100) and p-Si(100) pre-etched in KOH/isopropanol to produce pyramidal textures. Subsequently, these wafers were subjected to metal-assisted chemical etching (MacEtch) in 1:1:1 (v:v:v) HF(49%):H2O2(30%):EtOH solutions, to produce porous silicon (PSi) containing both micro- and nanoscale roughness features. The resulting surfaces exhibit morphologies that evolve with processing conditions, especially the absence/presence of pyramidal textures and the time the structure is subjected to MacEtch. Under optimal conditions excellent anti-reflection behavior is observed with surface reflectivities being reduced below 10% for either p-Si(100) or p-Si(111) surfaces. For p-Si(100) better results (R∼5%) were obtained for 30 min KOH/isopropanol pre-etch than for either no pre-etch or longer (60 min) pre-etch. The influence of the reductant on Ag particle deposition on p-Si(111) was studied, and MacEtch catalyzed by Ag produced from acetaldehyde reductant produced surfaces with lower reflectivities than those with glucose reductant.

Graphical AbstractFigure optionsDownload as PowerPoint slideHighlights
► MacEtch of Si wafers produces antireflective layers for solar cells.
► Excellent light-trapping and surface reflectivity below 10% are observed.
► Pre-etching in KOH produces roughness features that reduce surface reflectivity.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solar Energy Materials and Solar Cells - Volume 103, August 2012, Pages 98–107
نویسندگان
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