Structure and properties of sputter-deposited Al-Sn-N thin films

The material is hard at room temperature, with nanoindentation values of 17-24 GPa. Coatings on silica substrates are transparent and yellow to red-brown in colour. This is quantified as a shifting absorption edge, which moves from 211 to 510 nm, corresponding to an optical band gap of 5.9 and 2.4, respectively, as the Sn-content is increased. The index of refraction varies between 2.0 and 2.6. The deposited materials are thus hard, and have a tuneable absorption edge, which could be applicable in optical applications as a multifunctional optical filter with scratch resistant properties.