کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8000209 | 1516272 | 2015 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of doping in thermochromic V1âxWxO2 and V1âxAlxO2 thin films: Twice improved doping efficiency in V1âxWxO2
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
The parameters of thermal evaporation and magnetron sputtering deposition were optimized for fabrication of vanadium dioxide thin films. The O2 partial pressure during film deposition is critical for obtaining a pure VO2 phase. Thermochromic V1âxWxO2 (x = 0.16 at.%) thin films were synthesized by thermal evaporation, while thermochromic VO2, V1âxWxO2 (x = 0.04 at.%, 0.12 at.%, 0.35 at.%) and V1âxAlxO2 thin films were synthesized by magnetron sputtering. The structural properties of the deposited films were analyzed by X-Ray Diffraction (XRD), while their semiconductor-to-metal phase transitions were studied by electrical resistivity using the four-probe technique. Contamination from the crucible was shown by chemical analysis of the V1âxWxO2 film deposited by thermal evaporation. Subsequent analyses of the films by Rutherford Backscattering Spectrometry (RBS), yielded doping efficiency of â49 ± 5°C/at.% and of â55 ± 7°C/at.% is respectively reported for films deposited by thermal evaporation and for films deposited by magnetron sputtering. These results suggest that the doping efficiency observed in the present study is twice as effective as previously reported in literature. X-ray diffraction analyses showed a progressive amorphization of the V1âxAlxO2 films with increasing aluminum doping.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 621, 5 February 2015, Pages 206-211
Journal: Journal of Alloys and Compounds - Volume 621, 5 February 2015, Pages 206-211
نویسندگان
Antonio Paone, Rosendo Sanjines, Patrick Jeanneret, Harry J. Whitlow, Edouard Guibert, Geoffroy Guibert, François Bussy, Jean-Louis Scartezzini, Andreas Schüler,