Detailed investigation of submicrometer-sized grains of chemically sprayed (Sn1−xAlx, O2) (0 ≤ x ≤ 0.085) thin films

► The pure and Al doped SnO2 nanostructures are chemically sprayed from (SnCl4·5H2O) as starting material and aluminum (3+) chloride (AlCl3) as doping source. ► The X-rays of these nanostructures were analyzed and largely investigated. Further more details were obtained. ► Al doped SnO2 nanostructures can be prepared by spray pyrolysis for advanced technological applications such as sensors. ► Pictures and parameters of AFM analysis were described, several results for advanced and applied physics and technology were revealed.