کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
80084 | 49373 | 2010 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Plasma texturing for silicon solar cells: From pyramids to inverted pyramids-like structures
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی شیمی
کاتالیزور
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Plasma texturing for silicon solar cells: From pyramids to inverted pyramids-like structures Plasma texturing for silicon solar cells: From pyramids to inverted pyramids-like structures](/preview/png/80084.png)
چکیده انگلیسی
We have studied systematically a dry and free mask texturing process of crystalline silicon wafers using SF6/O2 plasmas in a reactive ion etching (RIE) system, with special attention on the effect of the RF plasma power and the SF6/O2 ratio on the texture of the silicon surface. In particular, we have found that by increasing the RF power, with an optimized SF6/O2 ratio and pressure it is possible to switch from a random texture, to a pyramid-like texture and finally to an inverted pyramid-like texture. This resulted in average reflectance values as low as 6%, which open an exciting opportunity for crystalline silicon solar cells applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solar Energy Materials and Solar Cells - Volume 94, Issue 5, May 2010, Pages 733–737
Journal: Solar Energy Materials and Solar Cells - Volume 94, Issue 5, May 2010, Pages 733–737
نویسندگان
M. Moreno, D. Daineka, P. Roca i Cabarrocas,