Evaluation of crack resistance of CrSiCN coatings as a function of Si concentration via nanoindentation

As seen in Fig. 1a, CrSiCN(5) coating presents some cracks parallel to indenter edge due to unbalance of compressive stress after unloading, whereas CrSiCN(15) and CrSiCN(20) coatings confront radial cracks, especially, CrSiCN(20) coating with longer radial crack. However, neither paralleled crack nor radial crack present on indentation mark of CrSiCN(10) coating.328