In-line deposition of silicon-based films by hot-wire chemical vapor deposition

► Inline-deposition of amorphous silicon by hot-wire CVD (cat-CVD). ► Carrier lifetime optimization of hot-wire CVD intrinsic amorphous silicon films. ► Passivation of heterojunction solar cells with intrinsic thin layer (HIT cells). ► Characteristics of HIT solar cells fabricated by inline hot-wire CVD.