Structure and property of epitaxial titanium oxynitride grown on MgO(001) substrate by pulsed laser deposition

► High-quality epitaxial TiNxOy films with different oxygen content are successfully grown on MgO(001) substrates. ► The TiNxOy films contain a low density of defects. ► The lattice parameters of TiNxOy decrease with increased oxygen concentration. ► The TiNxOy films are very electrically conducting with resistivity of 28-33 μΩ cm. ► The TiNxOy films show the hardness and Young's modulus of about 23-26 GPa and 400-430 GPa, respectively.