Analysis of nitrogen-doped ion-beam-deposited hydrogenated diamond-like carbon films using ERDA/RBS, TOF-ERDA and Raman spectroscopy

► Nitrogen-doped DLC was deposited by the anode layer source. ► Hydrogen content is 18-24 at.% and only slightly varies with deposition parameters. ► Structurally, increasing the N2 flow or the discharge voltage has a similar effect. ► Both cause an increasing structural ordering and a decreasing CC sp3 content.