Comparing deposition of organic and inorganic siloxane films by the atmospheric pressure glow discharge

► It has investigated the application of atmospheric pressure glow discharge in siloxane film deposition. ► The organosilicon film is hydrophobic while the SiOx-like film is hydrophilic. ► The organosilicon film is soft while the SiOx-like is so hard. ► The two siloxane films, especially the SiOx-like film have good corrosion resistance in Hanks solution.