Productivity potential of an inline deposition system for amorphous and microcrystalline silicon solar cells

Amorphous and microcrystalline silicon single layers and p–i–n solar cells were produced dynamically using an inline deposition system called “line source”. A highly uniform deposition of thin-film silicon layers with layer-thickness variations of less than ±5% was achieved. Amorphous and microcrystalline silicon single junction solar cells were dynamically fabricated with initial efficiencies of 8.3% and 6.3%, respectively. The dynamic deposition rate of these solar cells is 6.75 nm m/min in case of a-Si:H and 3.3 nm m/min for μc-Si:H. In this work it will be shown that an enhancement of the deposition rate up to 15.6 nm m/min during the i-layer deposition of a-Si:H solar cells has only a weak negative influence on the initial efficiencies of the cells. Further on, the effect of substrate velocity on solar cell characteristics of a-Si:H solar cells is investigated. Finally, a productivity estimation of the line source concept is presented.