Ultrasonic chemical bath deposition of ZnS(O,OH) buffer layers and its application to CIGS thin-film solar cells

Cu(In1−X,GaX)Se2(CIGS)-based thin-film solar cells have been fabricated using ultrasonic chemical bath deposition (US-CBD) of ZnS(O,OH) buffer layers. Small particles on the growing film were removed by US vibration. High-efficiency CIGS devices were achieved by one-deposition US-CBD process. It was found that the cell performance, especially FF, was improved by US-CBD.