کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8148626 | 1524340 | 2018 | 18 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Lateral overgrowth of diamond film on stripes patterned Ir/HPHT-diamond substrate
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موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Epitaxial lateral overgrowth (ELO) of diamond films on patterned Ir/(0â¯0â¯1)HPHT-diamond substrates have been carried out by microwave plasma CVD system. Ir/(0â¯0â¯1)HPHT-diamond substrates are fabricated by photolithographic and magnetron sputtering technique. The morphology of the as grown ELO diamond film is characterized by optical microscopy and scanning electronic microscopy. The quality and stress of the ELO diamond film are investigated by surface etching pit density and micro-Raman spectroscopy. Two ultraviolet photodetectors are fabricated on ELO diamond area and non-ELO diamond area prepared on same substrate, and that one on ELO diamond area indicates better photoelectric properties. All results indicate quality of ELO diamond film is improved.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 489, 1 May 2018, Pages 51-56
Journal: Journal of Crystal Growth - Volume 489, 1 May 2018, Pages 51-56
نویسندگان
Yan-Feng Wang, Xiaohui Chang, Zhangcheng Liu, Zongchen Liu, Jiao Fu, Dan Zhao, Guoqing Shao, Juan Wang, Shaopeng Zhang, Yan Liang, Tianfei Zhu, Wei Wang, Hong-Xing Wang,