Electron-induced KLL Auger electron spectroscopy of Fe, Cu and Ge

KLL Auger spectra excited by electrons with energies in the 30-35 keV range of Fe, Cu and Ge films were measured, using thin free-standing films. It was possible to obtain spectra with an energy resolution of about 1 eV. The observed spectra can not be described satisfactorily by just the multiplet splitting of the final state as calculated for an isolated atom. Additional features, due in part to intrinsic (shake satellites) and in part to extrinsic (energy loss of the escaping electron) processes formed a large fraction on the observed intensities. In particular a number of distinct satellite structures that are not predicted by the atomic Auger process are observed. For Fe and Cu the satellite peaks can be explained in terms of shake-up processes from the 3d5/2-4d5/2 states. Similar satellite structures observed in Ge are partly attributed to plasmon creation and partly to shake-up processes. It is demonstrated that both the thickness dependence of the observed intensity distributions and transmission electron energy loss measurements contain invaluable information for the interpretation of these spectra.