New improvements in energy and spatial (x, y, z) resolution in AES and XPS applications

This review presents the recent developments published in the literature about the use of Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) at high energy or spatial resolution. The past and present improvements due to technology (analysers, excitation source), and to mathematical procedures are described and discussed. New trends in the application of AES and XPS are related.