کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9670389 | 1450402 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Study of the impact of winding form and film thickness on thin-film inductors
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Study of the impact of winding form and film thickness on thin-film inductors Study of the impact of winding form and film thickness on thin-film inductors](/preview/png/9670389.png)
چکیده انگلیسی
Using a DC-magnetron sputtering system, we fabricated several forms of double-sided coupling thin-film inductors on a PCB (Printed Circuit Board). Due to the effects of winding forms and thickness of the film, the inductance, Q factor and resonance frequency of the inductors are different. Of the three types of inductors covering the same area, the meander inductor has the highest resonance frequency (up to 400 MHz), the circular-spiral inductor has the largest inductance (up to 1 μH/cm2) and Q factor (up to 25) at low frequency, and the hexagon-spiral inductor has moderate inductance and Q factor at an intermediate frequency. So the proper choice of winding form will depend on the specific application.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 81, Issues 2â4, August 2005, Pages 212-216
Journal: Microelectronic Engineering - Volume 81, Issues 2â4, August 2005, Pages 212-216
نویسندگان
Xiao-Li Tang, H.W. Zhang, H. Su, Y. Shi, X.D. Jiang,