کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9670567 | 1450404 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication error model and near field beam modulation analysis for phase step diffractive gratings
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication error model and near field beam modulation analysis for phase step diffractive gratings Fabrication error model and near field beam modulation analysis for phase step diffractive gratings](/preview/png/9670567.png)
چکیده انگلیسی
The structure aberrations of color separating grating (CSG), which is caused by the fabrication process, generate great modulations to the laser beam when CSG is used in the final optical system of a high power laser system. The beam modulations may lead to severe optical damages to CSG itself and the system. In this paper, a comprehensive fabrication error model for CSG is developed to study the beam modulation characteristics in the near field. Through theoretical calculations and simulations, the near field diffraction pattern of CSG is obtained, and the relationship between beam modulations and CSG structural aberrations is presented. The results show that beam modulations are mainly caused by the stair depth error and the slope error. This study provides a convenient way to estimate the possibility of optical damages induced by CSG.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volumes 78â79, March 2005, Pages 142-146
Journal: Microelectronic Engineering - Volumes 78â79, March 2005, Pages 142-146
نویسندگان
Fuhua Gao, Ying Cheng, Xionggui Tang, Jun Yao, Chuankai Qiu, Yongkang Guo,