کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9670571 1450404 2005 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Monolithically integrated micro flow sensor for lab-on-chip applications
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Monolithically integrated micro flow sensor for lab-on-chip applications
چکیده انگلیسی
A monolithically integrated micro flow sensor (MFS) for lab-on-chip application is presented. The MFS utilizes a miniaturized adaption of the anemometric principle. The combination of an established detection principle with the benefits of microtechnology results in a sensor with very high sensitivity. The temperature distribution in the microfluidic channel is simulated and compared with experimental results. The experimental investigation confirms that the micro MFS is able to detect flow rates as low as 10 nl/min.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volumes 78–79, March 2005, Pages 164-170
نویسندگان
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