کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9670623 1450404 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Correlation of surface roughness with edge roughness in PMMA resist
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Correlation of surface roughness with edge roughness in PMMA resist
چکیده انگلیسی
The edge roughness of lithographically defined resist features is an important aspect of the microfabrication of semiconductor devices. Previous work has demonstrated the dependence of the surface roughness of PMMA resist on developer composition and conditions; from which it was concluded that the origin of surface roughness was polymer phase separation during the development step. In this work, the same AFM microscopy technique is used to investigate edge roughness. For very steep edges, the AFM technique is unable to image the resist roughness close to the substrate due to shadowing by the higher parts of the resist. However, the change in dose at the feature edge can be lithographically controlled, which allows the edge roughness of steep features to be determined by extrapolation from AFM measurements on shallow exposure gradients. The effects of resist polymer re-deposition, due to phase separation at the rinse step, are clearly seen.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volumes 78–79, March 2005, Pages 484-489
نویسندگان
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