کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9829866 1524499 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Daily calibration of InAs growth rates using pyrometry
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Daily calibration of InAs growth rates using pyrometry
چکیده انگلیسی
In order to achieve reproducible layer thicknesses and compositions in samples which may be grown several weeks apart it is critical that the growth conditions are kept constant throughout this time. With this in mind the more in situ tools which are available to the grower, the better the control over critical parameters will be. In this paper we show that the interference effect which is seen when growing layers of differing refractive index on top of one another can be extended from the GaAs/AlAs materials system to include compounds containing Indium up to compositions near 55%.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 278, Issues 1–4, 1 May 2005, Pages 473-477
نویسندگان
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