کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9829964 | 1524500 | 2005 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Anomalous evaporation characteristics of vitrificated K(DPM) and stable gas supply using disk-shaped K(DPM) precursors for metalorganic chemical vapor deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this paper, we report a unique sublimation method of a solid precursor for metalorganic chemical vapor deposition (MOCVD). We found out that the vaporization rate of dipivaloylmethanatopotassium [K(DPM)] was much improved by carrying out the single-melting and re-solidification (vitrification) process. Although the contact area of re-solidified K(DPM) and carrier gas was greatly decreased, a higher-concentration gas supply exceeding powder-like K(DPM) was attained by using this method. Furthermore, the long-time stability of the vaporization rate was also attained by stacking several disks formed of re-solidified K(DPM) in a precursor container. By using the re-solidified disk-shaped K(DPM) as a potassium precursor, an adequate deposition rate and the reproducibility of stable potassium niobate (KNbO3) crystal film preparation were confirmed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 277, Issues 1â4, 15 April 2005, Pages 546-554
Journal: Journal of Crystal Growth - Volume 277, Issues 1â4, 15 April 2005, Pages 546-554
نویسندگان
Atsushi Onoe, Yuzo Tasaki, Kiyofumi Chikuma,