The influence of assisting ion elements on texture improvement of IBAD-Gd2Zr2O7 films

The texture evolution property of Gd2Zr2O7 (GZO) template films on non-textured Ni-based alloy was studied by off-normal ion-beam-assisted deposition (IBAD) at low temperature of 200 °C, with varied bombarding ion elements of Ar, Ne, and O. In all cases a 〈1 1 1〉 axis aligned toward the ion incident direction preserving out-of-plane (1 0 0) alignment. The in-plane mosaic spread (Δϕ) were clearly deteriorated for GZO films formed with assisting ions of Ar + Ne mixture or pure oxygen, compared to the case for pure Ar ion assisting. On the other hand, no recognizable ion elemental dependence on Δϕ was observed when GZO films were homoepitaxially grown by IBAD on already textured GZO surface.