Microwave property of YBCO film grown with two-step process

High temperature superconducting (HTS) YBCO films were deposited on (1 0 0) MgO substrates by pulsed laser deposition. From variation of orientation in YBCO films depending on thickness and deposition temperature, two-step process was introduced for property enhancement and the use of low fabrication temperature. YBCO films deposited by two-step process showed fully c-axis orientation without a-axis component and superconductive transition temperature of 89 K. In order to investigate microwave property, ring resonator with center frequency of 9.45 GHz was designed and fabricated by pattering YBCO films deposited at 700 °C, 750 °C and two-step process. YBCO ring resonator with only c-axis component deposited at 750 °C and two-step process showed better microwave property than YBCO resonator with mixture of a-axis and c-axis component deposited at 700 °C. In case of YBCO ring resonator using two-step process, insertion loss and Q-factor were about 2.3 dB and 240 at 77 K.