Keywords: اپی تیکسی امواج شیمیایی; CBE; Chemical Beam Epitaxy; CVD; Chemical Vapour Deposition; ENM; Engineered Nano Material; LDSA; Lung Deposited Surface Area; NP; Nano Particle; OECD; Organisation for Economic Cooperation and Development; OEL; Occupational Exposure Limit; PBZ; Personal