کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10620685 | 988653 | 2010 | 13 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment](/preview/png/10620685.png)
چکیده انگلیسی
Common failure mechanisms in microelectronics, such as electromigration, creep and fatigue, can be positively influenced by microstructure optimization. In this paper a combination of post-deposition heat treatment and self-ion bombardment is proposed as a valid candidate to gain control over the microstructure of (1 1 1) fiber textured thin silver films. Irradiation can induce a strong in-plane texture and hence lead to biaxially textured films through a process of selective grain growth. Moreover, we report microstructural stability of the irradiated regions over a wide range of temperatures (up to 600 °C), in contrast to non-irradiated portions of the film, which underwent abnormal growth of the (1 0 0) out-of-plane oriented grains, and a consequent texture change, at temperatures as low as 195 °C. The thermal stress induced in the film upon heat treatment was quantified in situ and its role in texture change elucidated.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Acta Materialia - Volume 58, Issue 19, November 2010, Pages 6513-6525
Journal: Acta Materialia - Volume 58, Issue 19, November 2010, Pages 6513-6525
نویسندگان
Matteo Seita, Christina M. Pecnik, Stephan Frank, Ralph Spolenak,