Single layer silicon photonic crystal slab

► We fabricate and characterize silicon photonic crystal slab on 260 nm freestanding silicon membrane with a silicon-on-insulator technology. ► High refractive index contrast between silicon and surrounding low index materials enable photonic crystal slabs function as dielectric mirrors for externally incident light. ► The optical performances of fabricated photonic crystal slabs can be tuned by varying the width of separation grooves or the air-hole size, which represents a significant advantage of offering various approaches for optical response control.