Observer-based vibration control of non-classical microcantilevers using extended Kalman filters

In non-classical micro-beams, the strain energy of the system is determined by the non-classical continuum mechanics. In this study, we consider a closed-loop control methodology for suppressing the vibration of non-classical microscale Euler-Bernoulli beams with nonlinear electrostatic actuation. The non-dimensional form of the governing nonlinear partial differential equation of the system is introduced and converted into a set of ordinary differential equations using the Galerkin projection method. In addition, we prove the observability of the system and we design a state estimation system using the extended Kalman filter algorithm. The effectiveness and performance of the proposed control scheme and estimation system are demonstrated based on computer simulations. In addition, we compare the results with those obtained by the classical theory of microscale beams.