Effect of temperature on the mutual diffusion of Ge/GaAs and GaAs/Ge

As it is well known, the diffusivity of the atoms (e.g. Ga, As, Ge) and intermixing of layers during sample preparation strongly depend on the substrate temperature. We found that the use of a low temperature GaAs buffer layer reduced the diffusion in GaAs/Ge epitaxy at 600 °C; while a Ge low temperature buffer layer was not effective in reducing the interdiffusion in Ge/GaAs epitaxy at 700 °C.