کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10707488 1023647 2011 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
An X-ray diffraction technique for analyzing structural defects including microstrain in nitride materials
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
An X-ray diffraction technique for analyzing structural defects including microstrain in nitride materials
چکیده انگلیسی
An X-ray diffraction analysis technique incorporating microstrain broadening is introduced to characterize nitride materials. The technique is tested using GaN and AlN samples prepared with different growth processes. The computation technique relies on simultaneously analyzing the X-ray profiles from a series of crystal planes and extracting the various broadening effects. An analysis ignoring the mircostrain term will often overestimate the effects of lattice tilt and lateral coherence length. The extended analysis results in much better fits, especially for planes with large Bragg angles. Improved estimates give a more complete picture of the structural properties of nitride materials.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 318, Issue 1, 1 March 2011, Pages 418-422
نویسندگان
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