کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10707599 1023760 2005 15 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Growth of thick GaN layers with hydride vapour phase epitaxy
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Growth of thick GaN layers with hydride vapour phase epitaxy
چکیده انگلیسی
In this paper we describe recent experimental efforts to produce high quality thick (⩾300 μm) GaN layers on sapphire, the removal of such a layer from the sapphire substrate, and the properties of the so obtained free-standing GaN material. The growth process is described in some detail in the vertical reactor geometry used in this work. Defects like dislocations, micro-cracks and pits produced during growth are discussed, along with procedures to minimize their concentration on the growing surface. The laser lift-off technique is shown to be a feasible technology, in particular if a powerful laser with a large spot size can be used. A major problem with the free-standing material is the typically large bowing of such a wafer, due to the built in defect concentrations near the former GaN-sapphire interface. This bowing typically causes a rather large width of the XRD rocking curve of the free-standing material, while optical data confirm virtually strain free material of excellent quality at the top surface.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 281, Issue 1, 15 July 2005, Pages 17-31
نویسندگان
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