کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1197743 | 1492987 | 2007 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Pressure-dependent rate coefficients of chemical reactions involving Si2H4 isomerization from QRRK calculations
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Pressure-dependent rate coefficients of chemical reactions involving Si2H4 isomerization from QRRK calculations Pressure-dependent rate coefficients of chemical reactions involving Si2H4 isomerization from QRRK calculations](/preview/png/1197743.png)
چکیده انگلیسی
The falloff behavior of reactions involving Si2H4* adduct isomerization is investigated in the framework of quantum Rice Ramsperger Kassel theory. Calculations are found in good agreement with the current knowledge on these reactions and provide new insight into less documented channels. The influence of pressure on the rate coefficient depends on the kind of reaction considered and can be well explained from the corresponding rate equations. Analytical expressions of the pressure-dependent rate coefficients are finally derived for several bath gases using SRI and Troe's parameterized forms. These analytical expressions can be used over a large range of temperature and pressure for modeling chemical processes involving silane or disilane pyrolysis such as chemical vapor deposition of silicon.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Analytical and Applied Pyrolysis - Volume 80, Issue 2, October 2007, Pages 460-470
Journal: Journal of Analytical and Applied Pyrolysis - Volume 80, Issue 2, October 2007, Pages 460-470
نویسندگان
A. Dollet, S. de Persis,