Surface elemental mapping via glow discharge optical emission spectroscopy

Glow discharge optical emission spectroscopy (GDOES) has evolved in the last couple of decades from direct bulk solid analysis to a high resolution depth-profiling technique. However, the achievable lateral resolution has been historically restricted to the diameter of the sputtered area, i.e. some millimetres. Recently, there has been a push toward characterizing and improving the GDOES limits of lateral resolution. In consequence, a door has been opened for applications to take advantage of the new information dimensions that the technique affords.It is important to sum what has been accomplished so far to clarify the current possibilities and opportunities for development. It will become evident that the data acquisition requirements of GDOES elemental mapping can only be met via spectral imaging. Accordingly, the studies performed to date will be reviewed with emphasis on the spectral imaging geometry that has been utilized.

► We review the state of the art of GDOES as applied to surface elemental mapping.
► The spectral imaging geometries used thus far are compared.
► The fundamental limits of the lateral resolution in GDOES are considered.
► Avenues for improvement of the technique and its applicability are proposed.