کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1417392 | 985969 | 2006 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth and characteristics of metal-containing diamond-like carbon using a self-assembled process
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی انرژی
انرژی (عمومی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A recently developed self-assembled method, involving the use of a single metal target and a fixed substrate in a sputter deposition chamber, was used for the growth of various metal-containing diamond-like carbon thin films. The metals used include, Cu, Pt, and Ni. The resulting films consist of self-assembled alternating dark and bright layers, both of which constitute a period. The dark layer was found to always have a higher metal concentration than the bright layer in a period. Effects of the growth condition on the growth rate, periodicity, and film structure were examined. The relation between the growth condition and the film characteristics is discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Carbon - Volume 44, Issue 7, June 2006, Pages 1210–1217
Journal: Carbon - Volume 44, Issue 7, June 2006, Pages 1210–1217
نویسندگان
Wan-Yu Wu, Jyh-Ming Ting,