Characterization of MOD-derived La2Zr2O7 epi-layers on textured Ni5W substrates by electron backscattered diffraction

La2Zr2O7 (LZO) buffer layers derived by metal organic deposition (MOD) were epitaxially grown on cube textured Ni5W substrates modified with an island-distributed LZO seed layer, and electron backscattered diffraction (EBSD) was employed to characterize the crystallographic relationship of the {0 0 1}〈1 1 0〉 rotated cube textured LZO grains with respect to the {0 0 1}〈1 0 0〉 cube textured Ni5W substrate. The uniformly distributed, islanded seed layer can effectively optimize the orientation of the double-layered LZO films, as proved by X-ray diffraction and EBSD analyses. It is concluded that the accelerating voltage is crucial for determinating the crystallographic orientation of the multilayer sample. Information about the epi-layer and the substrate was obtained at different accelerating voltages, which revealed, in particular, a superposed pattern of both layers.