کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1448404 | 988672 | 2010 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The role of self-shadowing on growth and scaling laws of faceted polycrystalline thin films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We investigate, via both experiment and simulation, the effects of self-shadowing on the growth of faceted polycrystalline thin films. Faceted aluminum thin films were sputtered and the anomalous scaling behaviour of their surfaces was characterized. To understand the causes of this anomalous behavior, growth of faceted thin films was simulated by coupling a level set construction to a ballistic deposition model. The angular distribution function of deposition flux was varied to control the degree of self-shadowing. We show how differing degrees of self-shadowing strongly modify film surface morphologies and compare these results with experimental findings.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Acta Materialia - Volume 58, Issue 15, September 2010, Pages 5150–5159
Journal: Acta Materialia - Volume 58, Issue 15, September 2010, Pages 5150–5159
نویسندگان
Colin Ophus, Timo Ewalds, Erik J. Luber, David Mitlin,