کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1450533 988737 2006 12 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Mechanical fatigue of polysilicon: Effects of mean stress and stress amplitude
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Mechanical fatigue of polysilicon: Effects of mean stress and stress amplitude
چکیده انگلیسی

Polycrystalline silicon (polysilicon) fatigue specimens with micrometer-sized dimensions were fabricated and subjected to cyclic loading using an integrated electrostatic actuator. The fatigue effects were determined by comparing the single edge-notched beam monotonic bend strength measured after cyclic loading to the monotonic strength of “virgin” specimens that had received no cycling. Both strengthening and weakening were observed, depending on the levels of mean stress and fatigue stress amplitude during the cyclic loading. Monotonic loading with similar sub-critical stress levels had no effect. The physical mechanisms responsible for this behavior are discussed, and a model based on grain boundary plasticity is presented for the strengthening behavior.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Acta Materialia - Volume 54, Issue 3, February 2006, Pages 667–678
نویسندگان
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